Formation and Study of Properties of TA And MO Nanocluster Films

In the work the results of studies of thin-film samples of nanoclusters of tantalum and molybdenum metals on the surface of silicon dioxide SiO2/Si (001) at room temperature are presented. The chemical composition and electronic structure of the obtained nanocluster films of Ta and Mo were controlle...

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Bibliographic Details

Main Author:	Kozlova, T I (author)
Other Authors:	Vasilyev, O S (author), Borisyuk, P V (author), Lebedinskii, Yu Yu (author)
Format:	article
Language:	English
Published:	2017
Online Access:	https://knepublishing.com/index.php/KnE-Engineering/article/view/1095 http://ridda2.utp.ac.pa/handle/123456789/4299
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